JPS6315742B2 - - Google Patents

Info

Publication number
JPS6315742B2
JPS6315742B2 JP56035021A JP3502181A JPS6315742B2 JP S6315742 B2 JPS6315742 B2 JP S6315742B2 JP 56035021 A JP56035021 A JP 56035021A JP 3502181 A JP3502181 A JP 3502181A JP S6315742 B2 JPS6315742 B2 JP S6315742B2
Authority
JP
Japan
Prior art keywords
epitaxial layer
type
region
substrate
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56035021A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57167634A (en
Inventor
Kazunori Imaoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56035021A priority Critical patent/JPS57167634A/ja
Priority to EP82301212A priority patent/EP0060676B1/en
Priority to DE8282301212T priority patent/DE3280219D1/de
Priority to IE559/82A priority patent/IE55966B1/en
Publication of JPS57167634A publication Critical patent/JPS57167634A/ja
Priority to US06/598,544 priority patent/US4597804A/en
Publication of JPS6315742B2 publication Critical patent/JPS6315742B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
JP56035021A 1981-03-11 1981-03-11 Semiconductor device Granted JPS57167634A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP56035021A JPS57167634A (en) 1981-03-11 1981-03-11 Semiconductor device
EP82301212A EP0060676B1 (en) 1981-03-11 1982-03-10 A method for the production of a semiconductor device comprising annealing a silicon wafer
DE8282301212T DE3280219D1 (de) 1981-03-11 1982-03-10 Verfahren zur herstellung einer halbleiteranordnung mit ausgluehen eines halbleiterkoerpers.
IE559/82A IE55966B1 (en) 1981-03-11 1982-03-11 A method for the production of a semiconductor device comprising annealing a silicon wafer
US06/598,544 US4597804A (en) 1981-03-11 1984-04-12 Methods of forming denuded zone in wafer by intrinsic gettering and forming bipolar transistor therein

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56035021A JPS57167634A (en) 1981-03-11 1981-03-11 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS57167634A JPS57167634A (en) 1982-10-15
JPS6315742B2 true JPS6315742B2 (en]) 1988-04-06

Family

ID=12430402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56035021A Granted JPS57167634A (en) 1981-03-11 1981-03-11 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS57167634A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117423U (en]) * 1990-03-14 1991-12-04

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617011A (en) * 1979-07-23 1981-02-18 Toshiba Corp Semiconductor device and manufacture thereof
JPS5717125A (en) * 1980-07-04 1982-01-28 Oki Electric Ind Co Ltd Manufacture of semiconductor device
JPS5787119A (en) * 1980-11-19 1982-05-31 Toshiba Corp Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03117423U (en]) * 1990-03-14 1991-12-04

Also Published As

Publication number Publication date
JPS57167634A (en) 1982-10-15

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